【摘要】 为了定标测量系统、提高测量精度,在简要论述了激光球面干涉仪的原理以后,采用移相技术,获得了四幅干涉图,并提取出范围在[-π,π)之间的相位。然后,利用相位消跳变算法,展开得到连续的相位。最后经过消倾斜和离焦等后继处理,得到了系统的波面误差。更多还原

【Abstract】 In order to calibrate the system and improve the accuracy of measurement, the systematic error of the laser sphericity interferometer is measured, by means of phase shifting technique and phase unwrapping technique. Then the wave error is calculated by subtracting tilt and defocus from the unwrapped phase.更多还原