【摘要】 叙述了软X射线波段反射式多层膜起偏器和检偏器的设计原则和设计方法,优化计算了5.9nm波长处多层膜光学元件的偏振性能,阐述了其制备的过程,利用小角度衍射法对多层膜的厚度进行了测量,并对同步辐射测量的反射率结果进行了拟合分析。更多还原

【Abstract】 The conditions for optimum polarization of reflective multilayered polarizers and analyzers in the soft X-ray range are given. The performances of reflection polarized components are optimized in 5.9nm,and the progress of the fabrication is present. The small angle diffraction method is used to measure the thickness of multilayer, and the reflectivity measured by synchrotron radiation is fit and analyzed.更多还原