【摘要】 根据近年来实际应用中对减反膜的新的需求和指标要求,利用光学薄膜设计软件进行模拟和理论分析,采用常规的薄膜工艺和设备进行大量实验,设计并制备出三种新型的减反膜:含金属膜的减反膜(包括窄带金属减反膜,宽带金属减反膜,减反防静电抗电磁辐射膜),超低反射率减反膜和大角度减反膜,满足了实际器件的应用要求。更多还原

【Abstract】 Three kinds of new anti reflection coatings are designed and fabricated by the use of optical coating design software analysis, general coating process and coating equipment. The AR coatings include: anti reflection coating with metal layer (narrow bandwidth, wide bandwidth and anti reflection coating with electrical static potential and magnetic shielding),ultra low AR coatings and large angle AR coatings meeting the requirement.更多还原