【摘要】 利用激光分子束外延技术在LaAlO3(100)单晶基片表面生长SrTiO3(STO)薄膜。通过反射式高能电子衍射原位实时监测STO薄膜自组装生长过程,采用原子力显微镜分析自组装生长演化过程,并利用X射线衍射分析薄膜结构及其生长方向。对不同生长条件下薄膜的生长的研究发现:在较低生长温度时,STO薄膜在(200)方向上以三维岛状模式进行生长,小岛在单位原胞尺度呈波浪状周期性排列,即出现自组装生长;而在较高的生长温度时,薄膜以层状模式进行生长自组装行为被抑止。并据此讨论了STO多元氧化物薄膜自组装生长条件及生长机理。更多还原

【Abstract】 SrTiO₃（STO） thin films were fabricated on LaAlO₃ （100） single crystal substrates by the laser molecular beam epitaxy method. The self-assembled growth process of STO thin films was in situ monitored by reflective high energy electron diffraction. The morphology and self-assembled growth evolution of the films were analyzed by atomic force microscopy. X-ray diffraction was employed to study the structure and the growth orientation of the films. At lower growth temperatures the STO films grow along （200） direction in 3dimensional island mode, which exhibits the periodic corrugated structure to form an （unique） nanoassembled template. However at higher deposition temperatures the films without the nanoassembled structure grow in layer-by-layer mode and the self-assembled growth behavior of the films is restrained. The mechanism and growth conditions of self-assembled growth of multicomponents complex oxide thin films are discussed.更多还原