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气囊式工具抛光新技术
New technology of ballonet tool for polishing
【摘要】 介绍了一种新型的光学加工技术———气囊式抛光。气囊为球形的柔性膜,外表面粘贴抛光模,内部充入低压气体。气囊具有可独立的控制变量:内部的压力、抛光接触区、进动运动、旋转速度。以IRP 200型为例,介绍气囊抛光的原理及其实用效果。研究和试验表明:气囊式抛光是一种实用、经济的高精度非球面抛光技术,有可能成为光学冷加工发展的一个主要方向。
【Abstract】 A new optical fabrication technology of ballonet tool polishing is introduced. The ballonet is a bulbous flexible membrane covered with a polishing pad and pressurized by an internal fluid. The tool has several independently controlled variables which are the internal pressure, the polishing contact area, the precession motion and the rotation speed of the tool. According to the IRP-200 polishing machine tool, the principle and practical effect of ballonet polishing is described. It is showed by the research and experiment that ballonet tool polishing is a practical and economical polishing technology of high precision and possibly becomes a main direction of optical figuring development.
【Key words】 ballonet tool polishing; precession; polishing contact area; pressurized press;
- 【文献出处】 光学技术 ,Optical Technique , 编辑部邮箱 ,2004年03期
- 【分类号】O439
- 【被引频次】76
- 【下载频次】544