【摘要】 介绍了一种新型的二维小角度检测装置。由于该装置采用了光电自准直结构,以高灵敏度的四象限硅光电探测器作为检测元件,采用交流调制,锁相放大的方法对信号进行了处理,所以有效地消除了直流漂移的影响,提高了稳定性和测试精度。分析了光斑的形状和大小对测试结果的影响,研制了专门的标定装置。首先由高精度的光电自准直仪标定测量角度与输出信号的关系,并将相关数据存入单片机,然后由软件拟合出关系曲线。测量时,既可自动显示角度的大小,同时也可以与计算机相连。该测试系统结构小巧,具有较高的测量精度。更多还原

【Abstract】 A novel dual axis small angle measuring method is introduced, which uses optics self-collimating structure and quadrant Si-photoelectric detector. The result effected by beam spot size is analyzed. In order to improve the instrument’s reliability and precision, AC modulate method and track signal processing are used. A special demarcation equipment is designed. First, the relation between the small angle and the output voltage is measured, secondly the curve is calculated, and it is saved in single chip microcomputer .The instrument can display the angle, and relate with computer. The equipment has a simple structure and high precision.更多还原