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数字微镜器件的时空特性对相位测量轮廓术的影响

Effect on the phase measuring profilometer to the spatio-temporal characteristic of DMD

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【作者】 曹益平苏显渝陈文静向立群张启灿

【Author】 CAO Yi-ping, SU Xian-yu, CHEN Wen-jing, XIANG Li-qun, ZHANG Qi-can (Department of Opto-electronics, Sichuan University, Chengdu610064, China)

【机构】 四川大学光电科学技术系四川大学光电科学技术系 四川成都 610064四川成都 610064四川成都 610064

【摘要】 数字微镜器件是一种新型的微电子、微机械、微光学集成器件,可广泛的用于大屏幕投影显示。实际上,数字微镜器件作为一种新型的空间光调制器,在光学信息处理和结构照明型三维传感中也具有广泛的应用前景。介绍了数字微镜器件和数字光处理器的基本原理,分析了数字微镜器件的时间空间特性,用计算机模拟了这种时空特性对相位测量轮廓术的影响。结果表明,数字微镜器件(DMD)可为投影系统在结构照明型光学三维传感中的应用提供指导。

【Abstract】 Digital micro-mirror device(DMD) is a new type of component which integrates with micro-electronics, micro-machinery and micro-optics. It can be widely used in the large-screen projection display system. In fact, DMD used as a new type of spatial-light modulator have a wide prospect in optical information processing and structured illumination three-dimensional sensing.The basic principles of DMD and digital light processor(DLP) are introduced particularly. The spatio-temporal characteristic of DMD is studied extensively. The effect on the phase measuring profilometer to the spatio-temporal characteristic of DMD is discussed by computer simulation. The result can give the guidance for the application of DMD in structured illumination three-dimensional sensing.

【基金】 国家自然科学基金资助项目(60177001);四川省重点科研资助项目
  • 【分类号】O439
  • 【被引频次】23
  • 【下载频次】340
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