【摘要】 铜材料X射线聚焦组合透镜是一种基于折射效应的X射线聚焦元件。简单介绍了组合透镜的设计理论研究结果,并据此对材料作了选择。针对铜材料组合透镜,分析了组合透镜结构参数、X射线工作波长的选择对组合透镜光学性能的影响。在此基础上,设计了组合透镜的结构参数,使其在硬X射线波段具有较好的聚焦性能,并能获得较高的焦斑强度。采用准LIGA技术制作了铜材料X射线组合透镜,给出了部分铜材料X射线组合透镜结构测量结果。更多还原

【Abstract】 The compound X-ray lens is a novel refractive X-ray optical device. A brief introduction on its theoretical method is presented. The relationship between the parameters of Cu compound X-ray lens and its performance is analyzed. The compound X-ray lens presented is proposed for sub-micrometer focusing of high-energy X-rays (>5keV) to gain better focusing performance and transmission efficiency at the focal plane. A micro-fabrication technique called quasi-LIGA technology is used to manufacture the Cu compound lens. A brief description of the processing of the technique is given, and the characterizations of the structure of the compound lens by SEM are also shown.更多还原