【摘要】 研究了一种基于全光纤马赫-曾德尔(Mach-Zehnder)干涉仪的高灵敏度微位移传感器,将干涉仪的一个臂固定在微动平台上,在消除环境干扰的情况下,通过对干涉仪臂的拉伸,从光谱仪观察干涉谱线中某一特定波长的移动与拉伸长度成正比,从而实现了一种位相调制型微位移传感器。当位移变化0.0020mm时,波长移动了0.61nm,调谐速率为305nm/mm,线性拟合度为0.9994。更多还原

【Abstract】 A high-resolution displacement sensor based on all-fiber Mach-zehnder interferometer is demonstrated in this paper. Sticking one arm of the interferometer on the translation stage, in the case of elimination of environmental interference, when the arm is being stretched, the shifting of a certain wavelength through OSA can be seen. When the displacement is changed 0.0020mm, the wavelength shifts 0.61nm and the tuning efficiency occurs 305nm/mm. The shifting of the wavelength is linear to the displacement and the linear fitting is 0.9994.更多还原