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CVD金刚石膜中1145cm-1拉曼峰的研究

Study of 1145cm-1 Raman Peak of CVD Diamond Film

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【作者】 阎研张树霖郝少康刘尔凯韩毅松玄真武顾长志刘维丁明清

【Author】 YAN Yan~1, ZHANG Shu-lin~1, S. K. Hark~2, LIU Er-kai~3, HAN Yi-song~3, XUAN Zhen-wu~3, GU Chang-zhi~4, LIU Wei~4, DING Ming-qing~5 (1. Peking University, Beijing 100871,China; 2. Chinese University of Hong Kong, Hong Kong, China; 3. Beijing Tiandi Orient Supperhard Materials Co., LTD., Beijing 100018, China; 4.Institute of Physics, CAS, Beijing, 100081; 5.Argonne National Laboratory, U.S.A)

【机构】 北京大学物理学院香港中文大学物理系北京天地东方超硬材料股份有限公司中国科学院物理所美国阿贡国家实验室 北京 100871香港中文大学物理系香港沙田北京 100871香港沙田北京 100018北京 100081美国

【摘要】 用拉曼光谱手段对CVD方法生长的金刚石膜,特别是其中最有争议的1145cm-1附近的拉曼峰进行了研究。用不同波长激光激发得到此峰的拉曼谱与量子尺寸选择效应所预期规律的相反,反驳了将1145cm-1附近的拉曼峰指认为纳米晶金刚石本征峰的说法。而通过对不同样品的比较,从侧面支持了将它归结为杂质,即反式聚乙炔的指认。更进一步通过分析不同尺寸的样品中杂质峰的相对强度,提出了这个峰的强度或许可以作为金刚石晶粒尺寸判据的建议。

【Abstract】 The Raman spectra of diamond films, prepared by CVD are studied, with special attention on the controversial Raman peak around 1145cm-1. It was said that this is the fingerprint of nano-crystalline diamond. However, under various excitation laser lines, the behavior of the peak is opposite to that expected from the quantum size selection effect. Our results on different kinds of samples support the assignment that this peak is from residuals in the preparation, possibly trans-polyacetylene. Furthermore, by comparing the relative intensity of this Raman peak from every sample, we think the intensity can be used to judge the grain size within the diamond film. By this means, we can tell the quality of CVD diamond film conveniently.

【基金】 国家自然科学基金资助(编号:60290083,50272017)
  • 【文献出处】 光散射学报 ,Chinese Journal of Light Scattering , 编辑部邮箱 ,2004年02期
  • 【分类号】O657.3
  • 【被引频次】21
  • 【下载频次】338
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