【摘要】 根据微条气体室(MSGC)探测器的工作原理,分析了MSGC基板的选择依据,同时首次提出采用金刚石膜/硅复合材料作为MSGC基板的可行性。采用热丝辅助化学气相沉积(HFCVD)技术和相关退火工艺获得了金刚石膜/硅复合材料,并采用SEM、Raman光谱仪、微电流仪对复合材料的表面状况、结构、I V和C F特性进行了表征。结果表明,该复合材料经抛光后表面平整,退火后电阻率达约2.9×1010Ω·cm,电容值小且随频率变化稳定,均满足MSGC对基板材料的要求。更多还原

【Abstract】 On the basis of the working principle of micro-strip gas chambers （MSGCs） and research progress on MSGCs′ substrate material, we analyze the reason of choosing MSGCs′ appropriate substrate and firstly propose the idea of using diamond film/silica composite material as the substrate of MSGCs. In this paper, the diamond film/silica composite material for MSGCs was obtained by HFCVD and related annealing technology. SEM images, Raman spectrum, and electrical properties were investigated. The results indicated that the roughness of the composite substrate was rather low, and the resistivity increased to 2.9×10¹⁰Ω·cm after an annealing treatment. The capacitance of the composite material was very small and almost had no variety with frequency. All these proved that diamond film/silica composite material was a promising substrate for MSGCs.更多还原