【摘要】 利用反射式高能电子衍射(RHEED)在超高真空中对SrTiO3(100)、LaAlO3(100)、Si(100)单晶基片进行分析,讨论了衍射花样与晶体表面结构的对应关系,计算出表面的晶体学参数,同时采用激光分子束外延技术同质外延生长SrTiO3薄膜,根据RHEED衍射图样及强度振荡曲线实时监控薄膜的生长。更多还原

【Abstract】 In ultrahigh vacuum the surface structure of the SrTiO₃,LaAlO₃ and Si single crystal substrates was analysed by reflective high energy electron diffraction（RHEED）. The relationship between the diffraction patterns and the surface structure was discussed and the crystal lattice constants were obtained. Homoepitaxy of SrTiO₃ thin film was performed by laser molecular beam epitaxy（LMBE）. With the diffraction patterns and the intensity oscillations of RHEED,the layer-by-layer growth of the thin film was in-situ monitored.更多还原