【摘要】 报道了用两束相干激光在HF溶液中的多孔Si(PS)表面上干涉形成光强周期分布,通过光溶解得到了孔隙率周期变化的结构,从而制备出氧化PS周期性波导光栅。实现了辐射模与波导中传输模之间的耦合,并由外部入射光波或衍射光的方向确定了波导层的有效折射率。更多还原

【Abstract】 The lateral periodic porosity structure on porous silicon(PS) layer was obtained by photo-dissolution process by using two coherent laser beams falling on the surface of sample to form the interfering pattern on porous silicon in HF solution.The oxidized PS grating coupler was fabricated firstly in our experiment.The coupling between the radiating mode and guided mode was realized successfully.The effective refractive index was determined by measuring the direction of the input beam or output diffracted beam.更多还原