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Sb掺杂SnO₂/SiO₂纳米光学气敏薄膜的制备及其性质

Characteristics and Preparation of Nanometer-sized Sb-doped SnO₂/SiO₂Optical Gas-sensing Thin Films

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【Author】 GU Zheng-xian~(1**), LIANG Pei-hui~2, ZHANG Wei-qing~2(1.Laboratory of Photo-electric Functional Films,College of Sceince,University of Shanghai for Science and Technology,Shanghai 200093,China,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China)

【机构】上海理工大学理学院光电功能薄膜实验室；中国科学院上海光学精密机械研究所；中国科学院上海光学精密机械研究所上海200093；上海201800；上海201800；

【摘要】采用溶胶凝胶(sol gel)工艺制备了Sb掺杂SnO2/SiO2复合膜。通过X射线衍射(XRD)、傅立叶变换红外谱(FT IR)及原子力显微镜(AFM)表征了薄膜样品的物相结构与表面形貌,利用紫外可见光谱研究了复合薄膜光学特性,利用p 偏振光双面反射法对薄膜的气敏特性进行了测试。实验结果表明,薄膜中的晶粒具有纳米尺寸(～35nm)的大小,比表面积大,孔隙率高;薄膜的透光率高,可见光波段近95%;纳米Sb:SnO2/SiO2复合膜的气敏灵敏度高于纯SnO2薄膜及Sb掺杂的SnO2薄膜。更多还原

【Abstract】 Sb-doped SnO₂/SiO₂ nano-composition thin films were prepared by sol-gel method.The crystal structure and surface topograph of the thin films were characterized by X-ray diffraction（XRD）,Fourier transform infrared spectroscopy（FT-IR） and atomic force microscopy（AFM）.The optical properties of the thin films were studied by UV-VIS spectra.The gas-sensing property was tested by p-polarized reflectance.The experimental results show that,the crystalline grain size is about 34 nm,the specific surface area is large,and the duty porosity is high;the optical transmissivity is higher,near 95 % in visible spectrum range.Further,the gas sensitivity of Sb:SnO₂/SiO₂ nano-composition thin films is higher than one of Sb:SnO₂ thin films.更多还原