【摘要】 利用Preston方程,考虑了超精密环抛中的诸因素,如工件和磨盘转速比、偏心距以及压强,计算模拟了它们对磨削效果的影响。模拟表明,当转速比越接近1或偏心距越大时,磨削越均匀;均匀分布的压强越大,磨削越不均匀。在这三个影响因素中,转速比的作用最为显著。实现均匀磨削所需的压强应为二次型分布。这些为超精密环抛提供了指导,有助于实现主动控制。更多还原

【Abstract】 The factors such as workpiece and polishing lap rotating speed ratio, eccentricity and pressure intensity are investigated by means of Preston equation, and their influence on grinding effect is calculated and simulated. Simulation shows that grinding will be more homogeneous when rotating speed ratio approaches 1 or eccentricity is getting larger. The larger the uniformly distributed pressure intensity is, the more inhomogeneous the grinding will be. The effect of rotating speed ratio among these three factors is the most obvious one. The pressure intensity required in realizing uniform grinding should be quadratic distribution. This provides a guide for ultra-precision continuous polishing and it contributes to carrying out active control.更多还原