【摘要】 在已有105g压阻效应阵列式加速度微传感器版图设计的基础上,应用有限元理论及相关软件,对版图中的硅微悬臂梁进行了模态分析和结构动态计算。将宏观理论应用到微观结构分析中;并对该种结构的加速度传感器的样品进行了冲击实验,得到实验曲线。对计算分析与实验结果进行了比较,指出并分析了误差可能出现的方面。更多还原

【Abstract】 On the basis of an available design of 105g micro acceleration sensor array layout, the modal frequency and structure dynamic response of a silicon-cantilever-beam are analyzed using the finite element method and relevant software. In this paper a method of applying the macro-theories to the micro-structure has been tried. The shock experiment of the micro sensor was carried out, and the experimental result is obtained. This paper compares the results of simulation and experiment, then points out and analyzes possible reasons of error.更多还原