【摘要】 主要论述兆声清洗技术原理及其在微电子清洗工艺过程中的应用。采用兆声清洗法可以减少化学品和高纯水的用量,在不破坏晶圆表面特征的前提下,提高对亚微细颗粒及各种污染物的去除能力及生产效率。更多还原

【Abstract】 The text main discuss the principle of mega-sonic cleaning technology and the use in the technology process of microelectronics. The using of the mega-sonic cleaning can reduce the usage of chemical and ultra-pure water, refrain the surface feature of wafer from injury, and enhance the ability to remove tiny particles and production efficiency.更多还原