【摘要】 针对微电子行业IC芯片制造设备如光刻机而设计了磁悬浮微进给机构,并对它进行了电磁场耦合分析及解耦控制,准确综合地研究磁悬浮系统。在不计漏磁的简单磁路、磁力计算基础上,采用有限元分析软件ANSYS对电磁场进行有限元分析,得到考虑漏磁的磁场分布及准确的磁力计算结果,从而确定电流及气隙大小等悬浮控制参数,为控制设计与试验提供了参考。更多还原

【Abstract】 A precise feeding device with magnetic levitation was designed for chip manafacturing equipment, such as optical engravers. An integrated study was carried out on the magnetic levitation system by taking electromagnetic coupling and uncoupling control of it. Finite element analysis was performed for the electromagnetic field with finite element analysis software of ANSYS, and typical parameters of interest in magnetic analysis were obtained such as magnetic flux density, magnetic field intensity, magnetic forces and flux leakage etc., which supplied a reference for future use.更多还原