【摘要】 MOS结构高频C-V(电容-电压)特性测量是检测MOS器件制作工艺的重要手段。本文阐述了用高频检测法测量MOS电容的原理,介绍了用变频技术和集成芯片设计MOS结构高频C-V特性测试仪的方法。该测试仪电路简单,成本低,分辨率高,测量准确,稳定性好。更多还原

【Abstract】 The principle of MOS capacitance measurement based on the method of high frequency detection is presented. The design method of tester for high frequency C-V Characteristic of MOS structure using frequency conversion technique and integrated chip is introduced. The tester has advantages of simple circuit, low cost, high resolution, accurate result and good stabilization.更多还原