【摘要】 采用磁控溅射法制备的具有PZT结构驱动薄膜,结合微机械电子(MEMS)工艺制作以PZT薄膜为驱动的无阀型微驱动器。探讨了PZT薄膜微驱动器的制备工艺方法,解决了制备工艺中存在的关键问题。更多还原

【Abstract】 A valveless microactuator fabricated by the technology of microelectro mechanical system (MEMS) is depicted,and the PZT film driven to microactuator is deposited by the magnetic-controlled sputtering.The method of PZT film for microactuator is researched,and the solution for the key problems on prepared processes is also discussed.更多还原