【摘要】 由微机械加工技术和集成电路工艺制作的微悬臂梁,通过在其表面修饰以生化敏感层,能将电、热、应力和化学等信号变化转换成一个机械响应,配合以信号采集电路和测量系统,能够达到很高的灵敏度和精度。回顾微悬臂梁作为传感器的发展历程,介绍悬臂梁的工作原理,微梁的激励、检测方法以及基于微悬臂梁阵列传感器的优点,总结了世界上硅基微悬臂梁生化传感器的最新动态,并且展望微悬臂梁传感器这一新领域的应用前景。更多还原

【Abstract】 Microcantilever fabricated by micromechamical and integrated circuits technology, with biological and chemical sensitive layers coating on its surface, may transform electronic, thermal, stress, chemical signal into a mechanical response. High sensitivity and precision can be achieved with signal collection circuits and measurement system. The developing process of micromechanical cantilever-based sensors is reviewed. The working principle ,excitation and detection of the cantilever and the advantages of microcantilever-based array sensor are introduced. The latest development of this novel technique is summarized. The application prospect of this new area is drawn at last.更多还原