【摘要】 提出一种新型声光波导相位调制技术 ,用于光电集成M -Z光波导干涉型加速度计的信号调制。相位调制器工作在溅射有K8缓冲层的硅基底上 ,工作波长为 1 3μm。主要对声光调制器的特性参数进行了理论分析和优化设计 ,结果为 :氧化锌薄膜尺寸 5× 0 8× 0 0 0 3mm ,叉指换能器叉指对数N =17,中心距l=2 7 19μm ,中心频率f0=4 8MHz,中心指长L0 =4 4 6mm。更多还原

【Abstract】 A kind of novel optic waveguide phase modulator driven by a surface acoustic wave(SAW),applied to the signal modulation of photo electronic integrated accelerator based on Mach Zehnder interferometry, is present. The modulator deposited on K 8/Si substrate is made on the reference arm of M Z interferometer, and the wavelength is 1 3μm. The characteristic parameter of the acoustooptic modulator is analyzed theoretically and designed concretely, and the particular parameter is presented through by the calculation. The main design parameters of the modulator is as following: the ZnO thin film with the dimensions of 5 mm×0 8 mm×0 003 mm interdigital transducer with the fingers of 17 pairs, the SAW frequence of f 0=48 MHz, the electrode aperture width of l 0=4 46 mm and interdigital period l=27 19 μm.更多还原