【摘要】 采用微电子技术和微机械加工技术 ,在硅衬底上设计制作了集微型加热器和温度传感器于一体的热流式微流量传感器。在恒功率的工作模式下 ,分析了微流量传感器的特性曲线。实验结果表明 ,硅基热流式微流量传感器的测量范围在 1 0～ 80 0 μL/min之间。更多还原

【Abstract】 The microfluidic sensor based on the silicon is fabricated with the microelectronic technique and micromechanical process, including micro-heater and temperature sensor. Under the operational mode of constant heating power, the characters of microfluidic sensor are analyzed in this paper. The experimental results indicate that the measurement range of microfluidic sensor is about from 10 μL/min to 800 μl/min.更多还原