【摘要】 详细介绍了微机械电子系统的内涵。内容包括微型传感器、微型执行器等研究领域 .还介绍了微机械电子系统加工工艺 ,阐明了其涉及的科学技术问题 ,对信息MEMS用途及发展趋势做了较详尽的讨论。更多还原

【Abstract】 This paper details the definition of micro-electromechanical system (MEMS). It contains discussions of micro-sensor and micro-actuator,technology of MEMS, and some questions as concerns having an interest in scrence and technique. The application and tendency of IT MEMS are also clarified.更多还原