【摘要】 利用X射线双晶衍射方法 ,测定了垂直腔面发射激光器 (VCSEL)材料的衍射回摆曲线 ,除了主衍射峰 (“0”级衍射峰外 ) ,还观察到一级和二级卫星峰。同时对实验样品的双晶衍射回摆曲线中衍射峰的劈裂现象进行了理论分析。“0”级衍射峰半高宽与衬底GaAs的衍射峰半高宽比较接近 ,表明晶格具有很高的完整性。由这些衍射峰之间的角距离 ,计算出了VCSEL材料的周期D及Al含量x值。X射线双晶衍射结果表明生长所得结构与设计相符合更多还原

【Abstract】 The analysis of VCSEL material structure is made of X-ray double crystal diffraction. The structure parameters of VCSEL is obtained from the rocking curve. The first and second satellite peaks around the main(“0” level) diffraction peak appear in the VCSEL rocking curve. Interference fringes and splitting peaks in double crystal rocking curves are analyzed theoretically. The FWHM of diffraction peaks of “0” level and GaAs substrate are quite close, showing much higher integrity of the crystal lattice. The VCSEL period D and Al concentration x have been obtained from the angle distance △θ. The experimental results show that the grown structure is the same as the designed structure.更多还原