【摘要】 分别用磁控溅射、脉冲直流和射频等离子体辅助化学气相沉积(PCVD)技术得到了TiN、TiSiN、TiBN及Ti-C-N纳米复合超硬薄膜。用球盘式摩擦磨损试验考察了各种薄膜的磨损特性。结果表明此类纳米复合超硬薄膜的抗磨损性能比单纯的TiN薄膜有显著提高,但复合薄膜的室温摩擦因数较高,高温下摩擦因数也仅有轻微降低,可能由于表层生成减摩氧化层所致。特别对于TiSiN薄膜,随薄膜中Si含量的上升,其耐磨损性能有所下降。更多还原

【Abstract】 TiN,TiSiN ,TiBN and TiCN coatings were deposited respectively by pulsed PCVD ,R.F. PCVD and RMS. The room and high temperature tribological behaviors of the two coatings were studied using a ball-on-disc tester. Compared with TiN, the wear resistant properties of nanocomposite coatings were remarkably increased, all the coatings showed relatively low friction coefficient at high temperature, probably due to the lubricating effect of oxides formed before or during the friction process. Especially, the wear resistant properties of TiSiN nanocomposite coatings were decreased with increasing of Si content.更多还原