【摘要】 溶胶-凝胶工艺是一种很有前途的薄膜制备方法。简单介绍了薄膜的种类及制作方法。将溶胶-凝胶法与PVD法和CVD法等进行了比较,说明了其制膜的优点,如工艺简单、设备要求低以及适合于大面积制膜。具体介绍了用溶胶-凝胶法制膜的流程及应用,着重介绍了基片的清洗方法和薄膜的涂覆方法。更多还原

【Abstract】 The sol-gel technique is a promising method in preparing thin films. In this paper, categories and methods of thin films are briefly introduced. It possesses many advantages, such as the simple process for efficient production of films, compared with PVD and CVD methods. Then the whole procedure and applications of thin films are described in detail. It mainly concentrates on the methods of substrates clearing and techniques of coating.更多还原