【摘要】 本文结合国内外固体润滑膜的发展趋势 ,以及当前材料发展中有关“多相材料”的新理念 ,提出了一种新的固体润滑膜沉积方法———非平衡纳米复合等离子体镀膜法 (NCUPP)。采用该法成功地对几种材料 (Ti、N、Mo、S等 )进行精细的纳米复合 ,制备的固体润滑膜TiN MoS2 /Ti是多相纳米复合膜 ,其中的MoS2 基本上呈准非晶态 ,掺杂物Ti与MoS2 多相复合 ,形成了多相的纳米复合薄膜 ,具有良好的摩擦学性能 ,即摩擦系数低 ;耐磨损寿命长 ;抗潮湿氧化能力明显提高更多还原

【Abstract】 A method of depositing solid lubricating coatings (TiN-MoS 2/ Ti), named NCUPP (Nano-Composite Unbalanced Plasma Plating), has been developed. The microstructures and chemical composition of the coating was studied by scanning electron microscopy (SEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The TiN-MoS 2/ Ti composite coating deposited by NCUPP process possesses good tribological behaviors, such as lower friction coefficient, higher wear-life and higher ability of humidity-oxidation resistance.更多还原