【摘要】 为了提高硅基上单模波导器件与单模光纤的耦合效率和工艺容差 ,设计了一种实用新型光斑转换器 ,它由水平和垂直双向楔变的波导芯区和双内包层构成 .分析了内包层折射率与其厚度对耦合效率的影响 ,发现通过优化内包层的参数可以加强对扩展光场的限制 .针对在硅基上制作垂直楔变结构的波导还很困难的情况 ,提出了一种低成本、简单可行的制作方法更多还原

【Abstract】 A novel structure of spot size converter is designed to allow low loss and large alignment tolerance between single mode rib waveguide devices and fiber arrays theoretically.The spot size converter consists of a tapered rib core region and a double cladding region.Through optimizing parameters,an expanded mode field can be tightly confined in the inner cladding and thus radiation loss be reduced largely at the tapered region.The influence of refractive index and thickness of the inner cladding on coupling loss is analyzed in particular.A novel,easy method of fabricating tapered rib spot size converter based on silicon on insulator material is proposed.更多还原