【摘要】 比较了SOIRF电感与体硅电感的性能 ,并根据模拟结果分析了电感中空面积 ,电感形状结构 ,金属宽度、间距对SOI电感品质因数Q、自谐振频率、电感量L的影响 ,最后提出了一种基于SOI衬底RF电感的优化设计原则 .以往射频集成电感性能的比较并不固定电感值 ,而文中全部参数的变化都是在电感值相同的情况下进行比较更多还原

【Abstract】 The characteristics of SOI RF inductors are compared to those of bulk RF inductors.The simulating results of the RF inductors on SOI are presented,and the effects on the inductance,quality factor,and self-resonant-frequency brought by the change of the inductor parameters are analyzed.Finally,some design and optimization principles of RF inductors based on SOI are suggested according to these results and analysis.The comparing way in this paper,which is based on same inductance is different from before.更多还原