【摘要】 对原子力显微镜微悬臂变形进行了研究。微悬臂工作时的变形为大变形状态,由椭圆积分理论给出微悬臂大变形[1,2]时的垂直位移和水平位移的理论公式,为微悬臂的设计制造及针尖与样品间相互作用力的计算提供了新的精确计算方法。更多还原

【Abstract】 The change shape of microcantilever is big change shape at work. The th eoretical formula of the vertical displacement and the level displacement at the big change shape of microcantilever is given by the theory of the ellipse integ ral. A new computing method is supplied for the design and make of microcantilev er,and the calculation of each other force in the sharp point of the needle and sample.更多还原