【摘要】 根据国内外发展的经验,从绝缘介质膜的制备、微桥膜内的残余应力到微桥膜的弹性系数这些影响驱动电压的关键因素出发,提出了一些新的微加工工艺和设计方法,为设计性能优良的RF-MEMS开关提供一种有效的方案,也为RF-MEMS开关设计和研制提供了有意义的探讨。更多还原

【Abstract】 Some available microfabrication processes and designs are provided in following aspects which affect the actuation voltage:dielectric layer preparation,residual stress and effective spring coefficient of the membrane of the microbridge. These methods can provide valuable reference for RF MEMS switch designing.更多还原