【摘要】 介绍了硅片级可靠性之所以成为现在半导体工艺研发重要组成部分的原因。对硅片级可靠性所涉及的各个项目作了详细的介绍。同时,对各个项目的测试和评价方法也做了详细的分析。最后,对硅片级可靠性测试的发展方向做了分析。更多还原

【Abstract】 The importance of wafer level reliability (WLR) testing for the R&D of semiconductorprocess is introduced. A brief review of items and development of WLR was provided, also the futuredevelopment of WLR was analyzed.更多还原