【摘要】 光发射显微镜(PEM)是90年代发展起来的一种高灵敏度、高分辨率的新型缺陷定位分析技术。随着半导体器件线宽的不断下降,光发射显微镜已广泛使用于IC和分立器件中漏电、击穿、热载流子等失效点的定位和失效机理的分析。本文介绍了光发射显微镜及在半导体器件进行失效分析的机理和实际应用。更多还原

【Abstract】 Photo Emission Microscope (PEM) is a high resolution technology developed in 90’s.since the linewidth of integrated circuit (IC) is continuously decreasing,PEM becomes more andmore important in device failure detection and analysis. This paper gives an overview of PEM tech-nology and its applications in microanalysis of failure devices.更多还原