【摘要】 随着光纤通信技术的迅猛发展,作为光交叉连接和光分插复用核心器件的光开关的作用日益突出。其中Si基光波导开关由于其成本低、可靠性高、器件制作工艺成熟等诸多优点而备受重视。综述了目前Si基光波导开关,特别是SiGe材料光波导开关的研究现状和进展。更多还原

【Abstract】 With rapid development of fiber-optic communications, the importance of optical switches is becoming increasingly prominent because they serve as one kind of key components for optical cross connect and optical add-drop multiplexer. Especially, Si-based optical waveguide switches are more promising owing to low-cost, high reliability, and very mature fabrication technology. In this paper, the recent progresses of Si-based SiGe optical waveguide switches have been discussed and analyzed.更多还原