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ELECTRO-MECHANICAL COUPLING ANALYSIS OF MEMS STRUCTURES BY BOUNDARY ELEMENT METHOD

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【Author】 ZHANG Kai CUI Yunjun XIONG Chunyang WANG Congshun FANG Jing (Department of Mechanics and Engineering Science,Peking University,Beijing 100871,China)

【机构】 Department of Mechanics and Engineering Science,Peking University,Beijing 100871,China；

【摘要】 <正> In this paper,we present the applications of Boundary Element Method(BEM)to simulate the electro-mechanical coupling responses of Micro-Electro-Mechanical systems(MEMS).The algorithm is programmed in our research group based on BEM modeling for electrostatics andelastostatics.Good agreement is shown while the simulation results of the pull-in voltages are comparedwith the theoretical/experimental ones for some examples.更多还原

【Abstract】 In this paper,we present the applications of Boundary Element Method(BEM) to simulate the electro-mechanical coupling responses of Micro-Electro-Mechanical systems(MEMS). The algorithm is programmed in our research group based on BEM modeling for electrostatics and elastostatics.Good agreement is shown while the simulation results of the pull-in voltages are compared with the theoretical/experimental ones for some examples.更多还原

【关键词】 MEMS； boundary element method(BEM)； electro-mechanical coupling；
【Key words】 MEMS； boundary element method(BEM)； electro-mechanical coupling；

【基金】 The project supported by the 973 Program (G1999033108);the National Natural Science Foundation of China (10125211)

【文献出处】 Acta Mechanica Sinica ,力学学报(英文版) , 编辑部邮箱 ,2004年02期

【分类号】TH-39
【被引频次】3
【下载频次】30

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