【摘要】 用反射式动态椭圆偏振光谱技术对Cu块材、Cu薄膜及Cu厚膜的光学常数进行了测试分析。研究结果表明:与Roberts块材、Johnson厚膜数据相比,不同方法得到Cu的光学常数在谱线形状上基本相似,但在数值上存在一定差别;在波长为250～830nm范围内,Cu块材和膜的折射率n与消光系数k分别在0.1～1.5和1.5～5.0之间;随膜厚增加,n值增大,k值减小;厚膜的n、k值与块材的更为接近。同时讨论了光学常数与微结构的关系。更多还原

【Abstract】 The optical constants of Cu bulk and sputtering Cu films were studied in details by employing a reflecting spectroscopic ellipsometer. The results show that our n, k curves are identical on the whole in shape but different in numeric value comparing with Robert’s bulk data and Johnson’s thick film data. In the range of 250～830nm, the refractive index n for Cu bulk and films varies between 0.1 and 1.5, and the extinction coefficient k varies from 1.5 to 5.0. As film thickness increases n raises and k reduces. The optical constants of thick film are closer to those of bulk. The relation between optical constants and microstructure is discussed as well.更多还原