NiTi shape memory alloy films were prepared by DC magnetron sputtering NiTi films were treated to get shape memory effect The transformation temperature and mechanical properties of NiTi films were studied It was found that the DSC curve of NiTi films crystallized at 550 ℃ for 1h shows one peak in heating process and two peaks in cooling process With the temperature increasing, fracture stress of NiTi films increases and residual strain decreases