【摘要】 讨论了离子注入机用三间隙强流离子加速管的聚焦特性 ,计算了各种能量离子束聚焦情况 ,并分析了抑制空间电荷效应所需要的电场强度。最后总结了三间隙加速管设计和调试应注意的问题。更多还原

【Abstract】 The focusing characteristics in the high ion beam implanter with three gap accelerating tube are discussed, the focusing degrees of different energy ion beam are computed, the electric fileds required to prevent beam expansion due to space charge effect are analyzed, and some questions of design and adjusting the implanter in the tube of the implanter are summarized.更多还原