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串联分子泵获得10^-9Pa真空的实验研究

Reaching the pressure of 10^-9 Pa using two serial turbomolecular pumps

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【Author】 CAI Xiao-hong,YANG Xiao-tian,CAO Zhu-rong,ZHANG Jun-hui, LU Rong-chun,YANG Wei and HAO Bin-gan (Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, China)

【机构】中国科学院近代物理研究所；中国科学院近代物理研究所甘肃兰州730000；甘肃兰州730000；甘肃兰州730000；

【摘要】介绍了采用两级分子泵串联系统获得 10 - 9Pa真空度的实验研究。实验证明 ,通过串联一台分子泵 ,可以有效地提高系统对氢气的压缩比 ,显著提高系统的极限压强。更多还原

【Abstract】 The vacuum system reaches the pressure of 10 -9 Pa by using two serial turbomolecular pumps. It is proved by experiment that the backing pump increases the compression ratio of H 2 and obtains the lower ultimate pressure of the system considerably.更多还原