【摘要】 经过相图分析提出了CVD金刚石膜上蒸镀Ti/Ni/Au的体系。采用该体系、富氧预处理工艺和电子束真空镀膜方法 ,金刚石膜和多层金属膜之间获得了良好结合强度。研究发现 :富氧预处理对多金属膜和金刚石膜之间的结合强度影响显著。进一步利用俄歇电子能谱 (AES)证实 :C向Ti中扩散层有 15 0nm之多 ,并出现了厚度约为 90nm稳定含量层 ,说明有确定化学比的反应产物生成 ;富氧处理在金刚石膜与Ti金属层之间增加了氧的含量 ,为形成TiO和TiC提供了合适的条件。更多还原

【Abstract】 Ti/Ni/Au Multi layers were grown by electron beam evaporation on the substrates of oxygen enriched diamond films prepared by chemical vapor deposition(CVD).The multi layers were studied with Auger electron spectroscopy(AES) and its phase transition map was also analyzed.The results show that oxygen enrichment of diamond film is responsible for the significant increase of adhesion at the multi layer/diamond interface.AES spectra confirm that carbon atoms may diffuse into the Ti layer as far as 150 nm.Oxygen enrichment and carbon diffusion into the Ti layer results in the formation of TiO and TiC,which considerably improves the interfacial adhesion.更多还原