【摘要】 采用脉冲激光沉积 (PLD)技术 ,分别在单晶硅基片和玻璃基片上沉积了NiZn铁氧体多晶薄膜 ,薄膜为单相尖晶石结构 ,在两种基片上都呈现出一定的 ( 4 0 0 )晶面的择优取向 ,但在硅基片上择优生长更显著 ;随着基片温度t的升高 ,薄膜晶粒尺寸逐渐增大 ;在t=5 0 0℃附近饱和磁化强度Ms 出现最小值 ,而矫顽力Hc 出现最大值 ;对薄膜进行退火处理 ,可使细小晶粒长大和内应力减小 ,对改善较低温度条件下制备的薄膜的软磁特性具有明显作用更多还原

【Abstract】 Polycrystalline films of NiZn ferrite have been deposited on Si and glass substrates by pulsed laser deposited(PLD).The results show that the films are single phase spinel structured and are of (400) preferential orientation on two kinds of substrates.But there is a more remarkably preferential orinentation for the films on Si substrate.The grain size increases gradually with increasing deposition temperature ( t ).When t =500 ℃,the saturation magnetization M s and coercivity H c have a minimun and a maximum,respectively.After annealing,small grains were found to grow and the stress in the films is also released,and we found that lower deposition temperature improves the soft magnetic properties of the films markedly.更多还原