【摘要】 本文给出用等离子化学气相沉积 (PCVD)技术制备的SnO2 /Fe2 O3 双层薄膜结构的俄歇谱 (AES)剖面分析、透射电镜 (TEM)断面形貌和扫描电镜 (SEM)表面形貌的实验研究结果。AES剖面分析和TEM断面形貌图显示在SnO2 与Fe2 O3 界面区有一个约 35nm厚的过渡层存在 ,其质地松散。实验还发现这个界面过渡层的存在缓解了层间应力 ,增强了SnO2 薄膜的附着力 ,对该双层膜的气敏特性有明显的控制作用 ;但当SnO2 层厚大于 2 70nm时 ,其控制作用几乎完全消失更多还原

【Abstract】 The SnO 2/Fe 2O 3 bilayer,grown by plasma chemical vapor deposition (PCVD),was studied with transmission electron microscopy (TEM),scanning electron microscopy (SEM) and Auger electron spectroscopy (AES).The AES depth profiles and TEM section analyses show that a soft transition layer,about 35 nm in thickness,exists at the interface of SnO 2/Fe 2O 3.We found that the interfacial transition layer favorably relaxes the stress,increases adhesion of SnO 2 on Fe 2O 3 and markedly controls the gas sensitivity of the bilayer.However,handly any influence of the transition layer on gas sensitivity can be observed when SnO 2 thickness exceeds 270 nm.更多还原