【摘要】 纳米碳管在储能材料和场发射材料等方面具有非常广阔的应用前景。在纳米碳管的许多潜在用途中要求纳米碳管直接低温生长在具有导电能力的基板材料上。以镍片为基板材料,利用微波等离子体化学气相沉积法在低温条件下合成了纳米碳管膜。研究表明,高纯度纳米碳管的低温合成取决于氢等离子体对碳源的有效裂解以及在纳米碳管形成初期对碳素物质的刻蚀。同时,随着微波功率的上升,纳米碳管的纯度上升、生长速率加快且形状变得较直。更多还原

【Abstract】 Electron sources and CNTs(carbon nano tubes) negative materials are two of the most promising applications of CNTs in the future. The synthesis of CNTs at low temperature has received a great deal of attention and becomes a challenging issue. Carbon nanotube films were synthesized on Ni substrate by microwave plasma chemical vapor deposition at low temperature. Because of the strong etching ability of hydrogen plasma, high pure carbon nanotubes can be produced at temperature range from 470 ℃ to 510 ℃. The temperature of Ni substrate, which was determined mainly by the plasma intensity, affects the growth of CNTs. At a substrate of 470 ℃, the CNTs are curly, whereas the CNTs were straight at temperature of 510 ℃. The grown rate of CNTs increased with the increase of plasma intensity.\;更多还原