This paper presents the principle and theset of experiments which can fulfil the electrochemicalmechanical polishing process. Several steel materials weretested by the electrochemical mechanical polishing pro-cess. Through the experiments, the results were achievedto indicate the ralationship of influence of machining pa-rameters on surface roughness. It is pointed out if a suit-able machining parameter is selected, then the value ofsurface roughness will be less than Ra 0.1.
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