【摘要】 应用TRIM程序模拟了离子在氚钛靶上的溅射产额。结果显示,O+、N+、C+和D+2等在氚钛靶上的溅射是导致氚钛靶寿命下降的重要因素。为了减小离子溅射对氚钛靶寿命的影响,束流入射角应小于45°。更多还原

【Abstract】 Ion sputtering yields on TTi target are numerically calculated with TRIM program. The data of sputtering yields demonstrate that O+, N+, C+ and D+2 would bring about the decrease of lifetime of TTi target. In addition, the incident angle of ion beam should be less than 45° for decreasing the effect of ion sputtering.更多还原