【摘要】 概述了力反馈型微机械加速度计的基本结构和工作原理,对其在重力场静态翻滚试验的输出特性作了数据分析,并对这种微机械加速度计的性能特点进行了综合评价。①更多还原

【Abstract】 A summary of the primary structure,working principle and main performance of micromachined accelerometer was presented. Using the experimental method of static rolling in gravity field, the output figures were analyzed in detail. In the end, the advantages and disadvantages of this kind accelerometer sensor were given in turn.更多还原