【摘要】 类金刚石薄膜(DLC膜)的成份(主要指sp3键和sp2键)是影响薄膜性能如薄膜的机械特性和电阻特性等的重要因素。因此,研究DLC膜的成份是非常必要的。本文介绍用X射线光电子能谱仪(XPS)测量薄膜成份的方法。通过采用脉冲真空电弧离子源研究在各种工艺条件下镀制的DLC膜,发现了影响DLC膜成份的主要因素。更多还原

【Abstract】 The composition(including sp3 and sp2) of diamondlike carbon film (DLC film) is an important factor that influences the film properties (mechanical property, resistance property etc), so it is very necessary to study the composition of DLC film. In this paper, the XPS method measuring the composition of DLC film is introduced. The composition of DLC film deposited by pulsed vacuum arc ion source under all technique conditions was measured by XPS, and the main factors that influence the composition of DLC film were educed.更多还原