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相移法在光栅投影测量中的应用

APPLICATION OF PHASE SHIFTING METHOD IN PROJECTION GRATING MEASUREMENT

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【作者】 潘伟赵毅阮雪榆

【Author】 PAN Wei,ZHAO Yi,RUAN Xueyu(Shanghai Jiaotong University, Shanghai 200030,China)

【机构】 上海交通大学国家模具工程研究中心上海交通大学国家模具工程研究中心 上海 200030上海 200030上海 200030

【摘要】 利用双目CCD相机记录的光栅投影测量技术是一种新型的光学测量方法。为了获得高精度测量相位值,提出一种优化相位测量精度的相移方法。该方法通过投影相传递函数和投影光的光强函数计算相位值,并考虑了测量投影光非正弦、非周期性的影响,提高了投影光栅的条纹精度和相位精度,相位精度为像素级,通过插值可达到亚像素级。

【Abstract】 Projection grating measuring technique, which records the measure ment results with binocular CCD camera, is a new optical measuring method. In Order obtaine a high accuracy measuring phase value, a phaseshifting method for optimizing phase measuring accuracy is put forward. With the projection phase transfer function and light intensity function of the projected light, the phase value is calculated by the method, in which the effect of the nonsine and aperiodicity of projected light is considered. The fringe accuracy and phase accuracy of the projection grating are increased. The phase accuracy is in the pixel level, and with the interpolation it can reach the subpixel level.

【基金】 教育部博士点基金资助项目(2000024838)
  • 【文献出处】 应用光学 ,Journal of Applied Optics , 编辑部邮箱 ,2003年04期
  • 【分类号】TH741.6-39
  • 【被引频次】38
  • 【下载频次】385
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