【摘要】 本文构筑了一种在同一干涉仪中可同时实现大范围和高精度纳米测量的双频激光合成波长干涉仪 ;针对该干涉仪的光路结构特点 ,提出一种新的粗精定位相结合的干涉信号同相位检测方法 ,实现了对不同频率干涉信号的同相位检测 ;实验测量结果表明该定位方法能够实现 0 .4 1nm的定位精度更多还原

【Abstract】 A dual frequency synthetic wavelength laser interferometer that can achieve the measurement of long range with nanometer accuracy is constructed. According to the optical feature of the interferometer, a novel coarse and fine positioning method for detecting the phase difference between two interference signals with different frequencies is proposed. The experimental result shows that the positioning method has a resolution of 0.41 nm.更多还原